Johann W Bartha: search on Z-Library

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1

Crystallization behavior of thin ALD-Al2O3 films

Stefan Jakschik, Uwe Schroeder, Thomas Hecht, Martin Gutsche, Harald Seidl, Johann W. Bartha

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 152 KB

english, 2003

2

Growth of aluminum oxide thin films with enhanced film density by the integration of in situ flash annealing into low-temperature atomic layer deposition

Henke, Thomas, Knaut, Martin, Hossbach, Christoph, Geidel, Marion, Albert, Matthias, Bartha, Johann W.

Journal:

Surface and Coatings Technology

Year:

2017

Language:

english

File:

PDF, 1.66 MB

english, 2017

3

Atomic layer deposition of tantalum oxide thin films using the precursor tert -butylimido-tris-ethylmethylamido-tantalum and water: Process characteristics and film properties

Henke, Thomas, Knaut, Martin, Geidel, Marion, Winkler, Felix, Albert, Matthias, Bartha, Johann W.

Journal:

Thin Solid Films

Year:

2017

Language:

english

File:

PDF, 2.42 MB

english, 2017

4

3D system integration on 300 mm wafer level: High-aspect-ratio TSVs with ruthenium seed layer by thermal ALD and subsequent copper electroplating

Killge, Sebastian, Bartusseck, Irene, Junige, Marcel, Neumann, Volker, Reif, Johanna, Wenzel, Christian, Böttcher, Mathias, Albert, Matthias, Jürgen Wolf, M., Bartha, Johann W.

Journal:

Microelectronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.68 MB

english, 2019

5

Experimental and simulation approach for process optimization of atomic layer deposited thin films in high aspect ratio 3D structures

Schwille, Matthias C., Schössler, Timo, Barth, Jonas, Knaut, Martin, Schön, Florian, Höchst, Arnim, Oettel, Martin, Bartha, Johann W.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2017

Language:

english

File:

PDF, 2.29 MB

english, 2017

6

Influence of Ionic Strength and pH-value on the Silicon Dioxide Polishing Behaviour of Slurries Based on Pure Silica Suspensions

Kuenzelmann, Ulrich, Estel, Kathrin, Bartha, Johann W, Meyer, Erwin-Peter, Barthel, Herbert

Journal:

MRS Proceedings

Year:

2010

Language:

english

File:

PDF, 158 KB

english, 2010

7

[IEEE 2017 IEEE 67th Electronic Components and Technology Conference (ECTC) - Orlando, FL, USA (2017.5.30-2017.6.2)] 2017 IEEE 67th Electronic Components and Technology Conference (ECTC) - 3D Optical Coupling Techniques on Polymer Waveguides for Wafer and Board Level Integration

Lungen, Sebastian, Charania, Sujay, Tiedje, Tobias, Nieweglowski, Krzysztof, Killge, Sebastian, Lorenz, Lukas, Bartha, Johann, Bock, Karlheinz

Year:

2017

Language:

english

File:

PDF, 881 KB

english, 2017

8

[IEEE 2019 Device Research Conference (DRC) - Ann Arbor, MI, USA (2019.6.23-2019.6.26)] 2019 Device Research Conference (DRC) - Demonstration and Endurance Improvement of p-channel Hafnia-based Ferroelectric Field Effect Transistors

Winkler, Felix, Pesic, Milan, Richter, Claudia, Hoffmann, Michael, Mikolajick, Thomas, Bartha, Johann W.

Year:

2019

Language:

english

File:

PDF, 970 KB

english, 2019

9

Low temperature etching of Si in high density plasma using SF6/O2

Johann W. Bartha, Johann Greschner, M. Puech, P. Maquin

Journal:

Microelectronic Engineering

Year:

1995

Language:

english

File:

PDF, 465 KB

english, 1995

10

Breakdown and Protection of ALD Moisture Barrier Thin Films

Nehm, Frederik, Klumbies, Hannes, Richter, Claudia, Singh, Aarti, Schroeder, Uwe, Mikolajick, Thomas, Mönch, Tobias, Hoßbach, Christoph, Albert, Matthias, Bartha, Johann W., Leo, Karl, Müller-Meskamp,

Journal:

ACS Applied Materials & Interfaces

Year:

2015

Language:

english

File:

PDF, 1.98 MB

english, 2015

11

Novel enhanced stressors with graded encapsulated SiGe embedded in the source and drain areas

Andreas Naumann, Stephan Kronholz, Anthony Mowry, Ina Ostermay, Helmut Bierstedt, Bernhard Trui, Kornelia Dittmar, Peter Kücher, Johann W. Bartha, Thorsten Kammler

Journal:

Materials Science and Engineering: B

Year:

2008

Language:

english

File:

PDF, 347 KB

english, 2008

12

Design, Fabrication and Comparison of 3D Multimode Optical Interconnects on Silicon Interposer

Charania, Sujay, Bartha, Johann, Neumann, Niels, Killge, Sebastian, Winkler, Felix, Al-husseini, Zaid, Szilagyi, Laszlo, Henker, Ronny, Ellinger, Frank, Plettemeier, Dirk

Journal:

Journal of Lightwave Technology

Year:

2020

Language:

english

File:

PDF, 7.92 MB

english, 2020

13

Micro-Patterned Silicon Surfaces for Biomedical Devices

Karola Richter, Christoph Kubasch, Johann-Wolfgang Bartha

Journal:

Plasma Processes and Polymers

Year:

2007

Language:

english

File:

PDF, 251 KB

english, 2007

14

Doped organic transistors operating in the inversion and depletion regime

Lüssem, Björn, Tietze, Max L., Kleemann, Hans, Hoßbach, Christoph, Bartha, Johann W., Zakhidov, Alexander, Leo, Karl

Journal:

Nature Communications

Year:

2013

Language:

english

File:

PDF, 826 KB

english, 2013

15

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Advances in Thin-Film Coatings for Optical Applications II - Hafnium oxide for optical applications deposited by different CMOS compatible methods

Albert, Matthias, Fulton, Michael L., Kruschwitz, Jennifer D. T., Roessler, Thorsten, Adolphi, Barbara, Bartha, Johann W., Grueger, Heinrich, Kunath, Christian, Sorge, Stephan

Year:

2005

Language:

english

File:

PDF, 1.58 MB

english, 2005

16

Enhanced growth and Cu diffusion barrier properties of thermal ALD TaNC films in Cu/low-k interconnects

Wojcik, Henry, Hossbach, Christoph, Kubasch, Christoph, Verdonck, Patrick, Barbarin, Yohan, Merkel, Ulrich., Bartha, Johann W., Hübner, Rene, Engelmann, Hans-Jürgen, Friedemann, Michael

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.30 MB

english, 2013

17

In situ XPS investigation about the growth of the first atomic layer of Ta(N) films deposited by thermal TBTDET ALD

Strehle, Steffen, Schmidt, Daniela, Gutsch, Sebastian, Knaut, Martin, Albert, Matthias, Bartha, Johann W.

Journal:

MRS Proceedings

Year:

2008

Language:

english

File:

PDF, 561 KB

english, 2008

18

2020 ESC Guidelines for the management of acute coronary syndromes in patients presenting without persistent ST-segment elevation

Collet, Jean-Philippe, Thiele, Holger, Barbato, Emanuele, BarthÃ©lÃ©my, Olivier, Bauersachs, Johann, Bhatt, Deepak L, Dendale, Paul, Dorobantu, Maria, Edvardsen, Thor, Folliguet, Thierry, Gale, Chris

Journal:

European Heart Journal

Year:

2020

File:

PDF, 4.40 MB

2020

19

Atomlagenabscheidung als Werkzeug für die Nanotechnologie

Matthias Albert, Johann Wolfgang Bartha

Journal:

Vakuum in Forschung und Praxis

Year:

2008

Language:

german

File:

PDF, 405 KB

german, 2008

20

Applications of Microstructured Silicon Wafers as Internal Reflection Elements in Attenuated Total Reflection Fourier Transform Infrared Spectroscopy

Schumacher, Henrik, Künzelmann, Ulrich, Vasilev, Boris, Eichhorn, Klaus-Jochen, Bartha, Johann W.

Journal:

Applied Spectroscopy

Year:

2010

Language:

english

File:

PDF, 1.77 MB

english, 2010

21

TSV Transistor – vertical metal gate FET inside a Through Silicon VIA

Winkler, Felix, Killge, Sebastian, Fischer, Dustin, Richter, Karola, Hiess, Andre, Bartha, Johann W.

Journal:

IEEE Electron Device Letters

Year:

2018

Language:

english

File:

PDF, 1.64 MB

english, 2018

22

The Doping of Si pâFET Devices by Gallium Focused Ion Beam Implantation Enabling Flexible Fabrication Routes at Moderate Temperatures

Winkler, Felix, Strobel, Carsten, Wenzel, Christian, Bartha, Johann Wolfgang

Journal:

physica status solidi (a)

Year:

2020

File:

PDF, 969 KB

2020

23

Physical characterization of thin ALD–Al2O3 films

Stefan Jakschik, Uwe Schroeder, Thomas Hecht, Dietmar Krueger, Guenther Dollinger, Andreas Bergmaier, Claudia Luhmann, Johann W Bartha

Journal:

Applied Surface Science

Year:

2003

Language:

english

File:

PDF, 222 KB

english, 2003

24

Al2O3-TiO2 Nanolaminates for Conductive Silicon Surface Passivation

Dirnstorfer, Ingo, Chohan, Talha, Jordan, Paul M., Knaut, Martin, Simon, Daniel K., Bartha, Johann W., Mikolajick, Thomas

Journal:

IEEE Journal of Photovoltaics

Year:

2016

Language:

english

File:

PDF, 2.17 MB

english, 2016

25

Atomic Layer Deposition of Titanium Dioxide Thin Films from Cp*Ti(OMe) 3 and Ozone

Rose, Martin, Niinistö, Jaakko, Michalowski, Pawel, Gerlich, Lukas, Wilde, Lutz, Endler, Ingolf, Bartha, Johann W.

Journal:

The Journal of Physical Chemistry C

Year:

2009

Language:

english

File:

PDF, 459 KB

english, 2009

26

Creation of Vias With Optimized Profile for 3-D Through Silicon Interconnects (TSV)

Karola Richter, Kay Viehweger, Jian He, Johann-Wolfgang Bartha

Journal:

Plasma Processes and Polymers

Year:

2009

Language:

english

File:

PDF, 378 KB

english, 2009

27

[IEEE 2011 Semiconductor Conference Dresden (SCD) - Dresden, Germany (2011.09.27-2011.09.28)] 2011 Semiconductor Conference Dresden - Characterization of barrier and seed layer integrity for copper interconnects

Wojcik, Henry, Lehninger, David, Neumann, Volker, Bartha, Johann W.

Year:

2011

Language:

english

File:

PDF, 1.29 MB

english, 2011

28

Characterization of Surface Processes During Oxide CMP by in situ FTIR Spectroscopy With Microstructured Reflection Elements at Silicon Wafers

Schumacher, Henrik, Kuenzelmann, Ulrich, Bartha, Johann W

Journal:

MRS Proceedings

Year:

2010

Language:

english

File:

PDF, 684 KB

english, 2010

29

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Advances in Resist Materials and Processing Technology XXX - Effects on electron scattering and resist characteristics using assisting underlayers for e-beam direct write lithography

Thrun, Xaver, Choi, Kang-Hoon, Hanisch, Norbert, Hohle, Christoph, Steidel, Katja, Guerrero, Douglas, Figueiro, Thiago, Bartha, Johann W., Somervell, Mark H.

Year:

2013

Language:

english

File:

PDF, 2.47 MB

english, 2013

30

Low-thermal budget flash light annealing for Al 2 O 3 surface passivation

Simon, Daniel K., Henke, Thomas, Jordan, Paul M., Fengler, Franz P. G., Mikolajick, Thomas, Bartha, Johann W., Dirnstorfer, Ingo

Journal:

physica status solidi (RRL) - Rapid Research Letters

Year:

2015

Language:

english

File:

PDF, 416 KB

english, 2015

31

Minority Currents in n-Doped Organic Transistors

Al-shadeedi, Akram, Liu, Shiyi, Keum, Chang-Min, Kasemann, Daniel, Hoßbach, Christoph, Bartha, Johann, Bunge, Scott D., Lüssem, Björn

Journal:

ACS Applied Materials & Interfaces

Year:

2016

Language:

english

File:

PDF, 1.57 MB

english, 2016

32

SPIE Proceedings [SPIE 17th Conference on Optical Fibres and Their Applications - Supraśl, Poland, Poland (Monday 23 January 2017)] Optical Fibers and Their Applications 2017 - Modeling and characterization of optical TSVs

Dorosz, Jan, Romaniuk, Ryszard S., Neumann, Niels, Charania, Sujay, Killge, Sebastian, al-Husseini, Zaid, Henker, Ronny, Ellinger, Frank, Bartha, Johann, Plettemeier, Dirk

Year:

2017

Language:

english

File:

PDF, 559 KB

english, 2017

33

Growth of the Initial Atomic Layers of Ta-N Films During Atomic Layer Deposition on Silicon-Based Substrates

Steffen Strehle, Daniela Schmidt, Matthias Albert, Johann W. Bartha

Journal:

Chemical Vapor Deposition

Year:

2011

Language:

english

File:

PDF, 651 KB

english, 2011

34

SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Nanotechnology VII - Atomic layer deposition of Al 2 O 3 on NF 3 -pre-treated graphene

Tiginyanu, Ion M., Junige, Marcel, Oddoy, Tim, Yakimova, Rositsa, Darakchieva, Vanya, Wenger, Christian, Lupina, Grzegorz, Kitzmann, Julia, Albert, Matthias, Bartha, Johann W.

Year:

2015

Language:

english

File:

PDF, 1.49 MB

english, 2015

35

High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses

Richter, Karola, Mocker, André, Bartha, Johann-Wolfgang

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2017

Language:

english

File:

PDF, 2.61 MB

english, 2017

36

Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers

Fischer, David Dustin, Knaut, Martin, Reif, Johanna, Nehm, Frederik, Albert, Matthias, Bartha, Johann W.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2020

File:

PDF, 2.27 MB

2020

37

Fast backscattering parameter determination in e-beam lithography with a modified doughnut test

Katja Keil, Marc Hauptmann, Kang-Hoon Choi, Johannes Kretz, Lukas M. Eng, Johann W. Bartha

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 709 KB

english, 2009

38

Adaptive Piezo-Controlled Carrier for CMP Processing

Weber, Christian-Toralf, Weiser, Jürgen, Zeidler, Dieter, Bartha, Johann W.

Journal:

MRS Proceedings

Year:

2004

Language:

english

File:

PDF, 1.01 MB

english, 2004

39

[IEEE 2011 Semiconductor Conference Dresden (SCD) - Dresden, Germany (2011.09.27-2011.09.28)] 2011 Semiconductor Conference Dresden - In situ XPS investigation of the chemical surface composition during the ALD of ultra-thin aluminum oxide films

Geidel, Marion, Knaut, Martin, Albert, Matthias, Bartha, Johann W.

Year:

2011

Language:

english

File:

PDF, 1.39 MB

english, 2011

40

Atomic layer deposition for high aspect ratio through silicon vias

Knaut, Martin, Junige, Marcel, Neumann, Volker, Wojcik, Henry, Henke, Thomas, Hossbach, Christoph, Hiess, André, Albert, Matthias, Bartha, Johann W.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.67 MB

english, 2013

41

In-situ real-time ellipsometric investigations during the atomic layer deposition of ruthenium: A process development from [(ethylcyclopentadienyl)(pyrrolyl)ruthenium] and molecular oxygen

Knaut, Martin, Junige, Marcel, Albert, Matthias, Bartha, Johann W.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2012

Language:

english

File:

PDF, 1.58 MB

english, 2012

42

Formation of regularly arranged large grain silicon islands by using embedded micro mirrors in the flash crystallization of amorphous silicon

Henke, Thomas, Bartha, Johann W., Rebohle, Lars, Merkel, Ulrich, Hübner, René, Albert, Matthias, Skorupa, Wolfgang

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 5.04 MB

english, 2014

43

Graphene based electron field emitter

Wenger, Christian, Kitzmann, Julia, Wolff, André, Fraschke, Mirko, Walczyk, Christian, Lupina, Gregorz, Mehr, Wolfgang, Junige, Marcel, Albert, Matthias, Bartha, Johann W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2015

Language:

english

File:

PDF, 1.01 MB

english, 2015

44

[IEEE 2006 1st Electronic Systemintegration Technology Conference - Dresden, Germany (2006.09.5-2006.09.7)] 2006 1st Electronic Systemintegration Technology Conference - Nanostructured Alumina Coatings for Room Temperature Processability of Au Bonding Wires

Schindler, Sebastian, Klaus, Christoph, Wenzel, Christian, Bartha, Johann, Rudolf, Frank, Wolter, Klaus

Year:

2006

Language:

english

File:

PDF, 7.62 MB

english, 2006

45

Thickness dependent barrier performance of permeation barriers made from atomic layer deposited alumina for organic devices

Klumbies, Hannes, Schmidt, Peter, Hähnel, Markus, Singh, Aarti, Schroeder, Uwe, Richter, Claudia, Mikolajick, Thomas, Hoßbach, Christoph, Albert, Matthias, Bartha, Johann W., Leo, Karl, Müller-Meskamp

Journal:

Organic Electronics

Year:

2015

Language:

english

File:

PDF, 970 KB

english, 2015

46

Association of age-dependent height and bone mineral density decline with increased arterial stiffness and rate of fractures in hypertensive individuals

EL-Bikai, Rana, Tahir, Muhammad R., Tremblay, Johanne, Joffres, Michel, Šeda, Ondřej, Šedová, Lucie, Awadalla, Philip, Laberge, Claude, Knoppers, Bartha-Maria, Dumas, Pierre, Gaudet, Daniel, Ste-Marie

Journal:

Journal of Hypertension

Year:

2015

Language:

english

File:

PDF, 326 KB

english, 2015

47

The Gatekeeping Function in Personalized Medicine Initiatives

Dalpe, Gratien, Kirby, Emily, Feze, Ida, Tasse, Anne-Marie, Knoppers, Bartha, Hamet, Pavel, Tremblay, Johanne, Phillips, Michael, Joly, Yann

Journal:

Current Pharmacogenomics and Personalized Medicine

Year:

2017

Language:

english

File:

PDF, 3.11 MB

english, 2017

48

Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid

Kirchner, Robert, Neumann, Volker, Winkler, Felix, Strobel, Carsten, VÃ¶lkel, Sandra, Hiess, AndrÃ©, Kazazis, Dimitrios, KÃ¼nzelmann, Ulrich, Bartha, Johann Wolfgang

Journal:

Year:

2020

File:

PDF, 1.10 MB

2020

49

Pad roughness evolution during break-in and its abrasion due to the pad-wafer contact in oxide CMP

Vasilev, Boris, Bott, Sascha, Rzehak, Roland, Bartha, Johann W.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.42 MB

english, 2013

50

Assessment of Planarization length variation by the Step-Polish-Response (SPR) Method

Bartha, Johann. W., Bormann, Tilo, Estel, Kathrin, Zeidler, Dieter

Journal:

MRS Proceedings

Year:

2004

Language:

english

File:

PDF, 231 KB

english, 2004

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